TEMPERATURE INFLUENCE ANALYSIS ON FREQUENCY CHARACTERISTICS OF SILICON MICROMECHANICAL GYROSCOPE
Abstract
The study of the characteristics of a silicon micromechanical gyroscope (MMG) under the influence of ambient temperature is necessary to solve the problem of ensuring the stabi lity of its characteristics. MMG tests have shown that resonant frequencies increase with i ncreasing temperature. The main reason for this is the occurrence of stresses in elastic su spensions due to a mismatch between the thermal linear expansion coefficients (TLEC) of the silicon structure and the glass substrate. The silicon sensitive element of the gyroscope was designed so that the natural frequencies of the primary and secondary oscillations were 12.5kHz and the frequency mismatch between them was no more than 10Hz. The studied sample of the sensitive element was packed in the case under a pressure of 10-2Pa. The test results showed that the natural frequency of the primary oscillations at 20°C takes the value of 12,585kHz, and the natural frequency of the secondary oscillations is 12,609kHz. The temperature coefficients of variation of the natural frequency of the primary and secondary oscillations in accordance are 1,61Hz/°C and 1,31Hz/°C.
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